MERLIN

MERLIN with the GEMINI II column combines ultra fast analytics, high resolution imaging using advanced detection modes, and future assured configuration flexibility on one single system.

Thanks to the prealigned GEMINI II optics imaging setting such as voltage or probe current can be seamlessly adjusted across orders of magnitudes to match your application and sample with next to no need for realignment. Even novice users will enjoy optimum results. System optimization for high current density, probe currents up to 300 nA, and superior resolution at high beam currents, guarantees fast results in nano-analytics.

Receive maximum information from your sample with parallel on-axis in-lens secondary electron (SE) and energy selective backscattered (EsB) detection capable of identifying smallest differences in materials composition.

Thanks its modular chamber design, over 15 ports, and a wealth of application specific modules including atomic force microscopy (AFM), in-situ ultra microtomy, large area mapping, and local charge compensation for convenient imaging of non-conductive samples your MERLIN comes with the built in flexibility to grow with your applications from a scanning electron microscope to a comprehensive nano-characterization laboratory.

Ask your contact at Carl Zeiss about MERLIN now.

Ask your contact at Carl Zeiss about MERLIN now.

Gain insights into nano materials, semiconductor samples, minerals, steels or alloys - a range of application specific options is available for you:

• Use SEM/AFM (Atomic Force Microscopy) Hybrid option and get information on your semiconductor and nano materials samples at atomic resolution.
  
• Map large samples areas for design verification of semiconductor structures with the ATLAS large area mapping module.
  
• Explore non-conducting samples such as minerals, ceramics, glass and polymers with no compromises in beam voltage, detection and analytics thanks to the charge compensation by localized variable pressure.
• Conveniently comprehend the topography and surface roughness of MEMS devices, nano structures, indentations for hardness measurements, or scratch marks in forensic investigations with real time 3DSM imaging module.
• Image magnetic samples with no image distortions thanks to unique GEMINI lens design.
• Add the ultra-microtome 3View to achieve 3D reconstructions of large volumes of soft matter.

Image of high insulating fiber with charge compensation by localized variable pressure.

Ask your contact at Carl Zeiss about MERLIN now.

The performance of modern materials, nanocomposits, polymers, high strength steels and semiconductor structures critically depends on smallest compositional details. The MERLIN complete detection system with the energy selective backscattered (EsB) on axis detection is ideally suited to reveal these compositional details. Thanks to energy filtering changes in the low loss regime of the backscattered electrons, which is sensitive to materials compounds and their derivates and phases, can be differentiated. The unique symmetrical on-axis design assures next to no need for realignment when operating parameters change.

For comprehensive sample characterization signal from other detectors, such as the in-lens secondary detector, can be recorded and displayed in parallel.

Ask your contact at Carl Zeiss about MERLIN now.

Ask your contact at Carl Zeiss about MERLIN now.

Extend the capabilities of your MERLIN to the third dimension: The 3DSM solution provides real time 3D imaging of your sample surface just as easy as conventional 2D imaging. The resulting 3D image can be visualized in various ways including anaglyph view, mesh view, textured view or contour overlay. Even quantitative 3D models can be obtained to measure surface roughness and topography.

The integrated metrology software allows visualization, analysis of the 3D surface models and generation of complete metrology reports.

Ask your contact at Carl Zeiss about MERLIN now.