MERLIN with the GEMINI II column combines ultra fast analytics, high resolution imaging using advanced detection modes, and future assured configuration flexibility on one single system.
Thanks to the prealigned GEMINI II optics imaging setting such as voltage or probe current can be seamlessly adjusted across orders of magnitudes to match your application and sample with next to no need for realignment. Even novice users will enjoy optimum results. System optimization for high current density, probe currents up to 300 nA, and superior resolution at high beam currents, guarantees fast results in nano-analytics.
Receive maximum information from your sample with parallel on-axis in-lens secondary electron (SE) and energy selective backscattered (EsB) detection capable of identifying smallest differences in materials composition.
Thanks its modular chamber design, over 15 ports, and a wealth of application specific modules including atomic force microscopy (AFM), in-situ ultra microtomy, large area mapping, and local charge compensation for convenient imaging of non-conductive samples your MERLIN comes with the built in flexibility to grow with your applications from a scanning electron microscope to a comprehensive nano-characterization laboratory.
||up to 0.6nm (STEM mode)
||up to 300nA
||20V to 30 kV
|Detection Modes (selection)
||on-axis in-lens secondary electron detection|
||on-axis in-lens energy selective backscattered detection for advanced materials contrasts; parallel in-lens SE and EsB imaging
|Angle selective backscattered Detector (AsB)
||For crystallographic contrasts.|
|3DSM||For real time 3D surface topography visualization.|
|STEM||Low voltage optimized bright field, 4 quadrant dark field, and high angular dark field transmission imaging.
|Application Modules (selection)|
|ATLAS large area mapping||For mapping large samples areas.|
|Atomic force microscopy (AFM)||Extending your SEM to resolve single atomic layers and to investigate surface magnetism or local conductivity.
|Local charge compensation||Image non-conducting samples without any compromises in detection.
|3View||In-situ ultra-microtome to achieve 3D reconstructions of large volumes of soft matter.
Gain insights into nano materials, semiconductor samples, minerals, steels or alloys - a range of application specific options is available for you:
Image of high insulating fiber with charge compensation by localized variable pressure.
Ask your contact at Carl Zeiss about MERLIN now.
The performance of modern materials, nanocomposits, polymers, high strength steels and semiconductor structures critically depends on smallest compositional details. The MERLIN complete detection system with the energy selective backscattered (EsB) on axis detection is ideally suited to reveal these compositional details. Thanks to energy filtering changes in the low loss regime of the backscattered electrons, which is sensitive to materials compounds and their derivates and phases, can be differentiated. The unique symmetrical on-axis design assures next to no need for realignment when operating parameters change.
For comprehensive sample characterization signal from other detectors, such as the in-lens secondary detector, can be recorded and displayed in parallel.
Only a simple exchange of the specimen stage is required to benefit from the respective advantages of both methods in one simple workflow:
Extend the capabilities of your MERLIN to the third dimension: The 3DSM solution provides real time 3D imaging of your sample surface just as easy as conventional 2D imaging. The resulting 3D image can be visualized in various ways including anaglyph view, mesh view, textured view or contour overlay. Even quantitative 3D models can be obtained to measure surface roughness and topography.
The integrated metrology software allows visualization, analysis of the 3D surface models and generation of complete metrology reports.
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